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SEMICONDUCTOR INSPECTION & METROLOGY EQUIPMENT
Spare Parts & Repair Services
KJT Japan provides spare parts and repair services for semiconductor inspection and metrology equipment. The current support list covers equipment manufactured by KLA Tencor, HITACHI, AMAT, HMI (ASML), Nikon and Olympus.
A total of 37 equipment models are listed, covering overlay metrology, wafer particle inspection, defect inspection, film thickness measurement, CD-SEM, Review SEM, E-Beam Inspection, optical inspection microscopes and FE-SEM equipment.
6
Supported Manufacturers
37
Listed Equipment Models
Spare Parts / Repair
Service Coverage
Supported Equipment Categories
Overlay Metrology Wafer Particle Inspection Brightfield / Darkfield Defect Inspection Film Thickness Measurement CD-SEM Review SEM E-Beam Inspection Optical Inspection Microscope FE-SEM
SUPPORTED MANUFACTURERS & MODELS
Supported Manufacturers & Models
The current support list includes 6 equipment manufacturers and 37 models for semiconductor inspection, defect inspection and metrology equipment.
KLA Tencor
20 ModelsArcher 100・Archer 200・Archer 300・Archer 500・SFS62XX・SFS64XX・ SP1・SP2・SP3・235X・28XX・AIT II・AIT XP・AIT UV・Puma 9000・ Puma 91XX・F5X・Spectra FX200・Aleris 8350・Spectra8660
HITACHI
7 ModelsS-9380・CG4000・CG4100・CG5000・S4800・S5200・S5500
AMAT
5 ModelsCX200・CX300・G2・G3・G5
HMI (ASML)
3 ModelseP Series・Escan315・Escan320
Nikon
1 ModelOST3200
Olympus
1 ModelAL3110 / 20 / 30
SUPPORTED EQUIPMENT & SERVICES
Supported Equipment & Service Coverage
Service coverage includes spare parts and repair services for semiconductor inspection, defect inspection and metrology equipment.
Spare Parts
Spare parts services for semiconductor inspection and metrology equipment
Equipment Repair
Repair services for semiconductor inspection and metrology equipment
| Equipment Category | Manufacturer | Supported Models | Services |
|---|---|---|---|
| Overlay Metrology Equipment | KLA Tencor | Archer 100・200・300・500 | Parts / Repair |
| Wafer Particle Inspection Equipment | KLA Tencor | SFS62XX・SFS64XX・SP1・SP2・SP3 | Parts / Repair |
| Brightfield Defect Inspection Equipment | KLA Tencor | 235X・28XX | Parts / Repair |
| Darkfield Defect Inspection Equipment | KLA Tencor | AIT II・AIT XP・AIT UV・Puma 9000・Puma 91XX | Parts / Repair |
| Film Thickness Measurement Equipment | KLA Tencor | F5X・Spectra FX200・Aleris 8350・Spectra8660 | Parts / Repair |
| Critical Dimension SEM (CD-SEM) | HITACHI | S-9380・CG4000・CG4100・CG5000 | Parts / Repair |
| Review SEM | AMAT | CX200・CX300・G2・G3・G5 | Parts / Repair |
| E-Beam Inspection Equipment | HMI (ASML) | eP Series・Escan315・Escan320 | Parts / Repair |
| Optical Inspection Microscope | Nikon Olympus | OST3200 AL3110 / 20 / 30 | Parts / Repair |
| Field Emission SEM (FE-SEM) | HITACHI | S4800・S5200・S5500 | Parts / Repair |
DOCUMENT DOWNLOAD
Supported Model List Download
PDF
Semiconductor Inspection & Metrology Equipment
Spare Parts & Repair Support Model List
The list covers 37 equipment models from KLA Tencor, HITACHI, AMAT, HMI (ASML), Nikon and Olympus.
Go to the Download Page →