- Product Overview
- Laser Source Replacement & Support
- Product Lineup & Output Specifications
- Compatible Equipment & Inspection Applications
Product Overview
PRODUCT OVERVIEW
New Solid-State Laser
This laser solution supports laser source replacement for selected metrology equipment .
While maintaining measurement accuracy, the solution is designed to reduce operating costs and improve equipment stability.
Laser installation and calibration are performed by our technical service team.
Product Lineup
Laser Source Replacement & Support
LASER SOLUTION
We provide the following support for laser sources used in metrology equipment.
01
Laser Source Replacement
Supports laser source replacement for selected metrology equipment.
02
Measurement Accuracy
Designed to maintain measurement accuracy.
03
Operating Cost
Helps reduce equipment operating costs.
04
Equipment Stability
Helps improve equipment operating stability.
05
Installation & Calibration
Laser installation and calibration are performed by our technical service team.
Product Lineup & Output Specifications
PRODUCT LINEUP
Compatible Equipment & Inspection Applications
COMPATIBLE EQUIPMENT
The output specifications, compatible equipment models, and inspection applications for each solid-state laser are shown below.
| Solid-State Laser | Output | Compatible Equipment | Inspection Application |
|---|---|---|---|
| ZH-Advanced 488 | 30 mW | 6200 / 6220 / 6400 / 6420 / SP1 TBI | Particle Inspection |
| 75 mW | AIT II / AIT XP / AIT XP+ / SP1 DLS | Dark-Field Defect Inspection / Particle Inspection | |
| ZH-Advanced 365 | 90 mW | AIT UV / AIT XUV | Dark-Field Defect Inspection |
| ZH-Premium 355 | 350 mW | SP2 / SP2XP | Particle Inspection |
| 1 W | 9000 | Dark-Field Defect Inspection | |
| 2.5 W | 9100 / 9110 / 9120 / 9130 / 9150 | ||
| 3.75 W | 9550 |
Please Confirm Equipment Compatibility
For details regarding compatible equipment models, output specifications, and inspection applications,
please contact us.
please contact us.
Laser installation and calibration are performed by our technical service team.






