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IDI-CYBOR Chemical Dispense Pumps & Dispense Units
IDI-CYBOR chemical dispense pumps and dispense units are designed for applications involving photoresist, polyimide, SOG, solvent and developer.
This page introduces five product groups: M610/M650, M450/M550, M7000 Series, M300/M310 and M5000.
Product Lineup
| Series | Type | Primary Chemicals |
|---|---|---|
| M610/M650 | High-viscosity dispense | High-viscosity photoresist and polyimides |
| M450/M550 | Pressure on Demand | M450: Photoresist M550: SOG, FOX, SILK and DE |
| M7000 Series | Positive Displacement | Photoresist |
| M300/M310 | Pressure on Demand | M300: Photoresist M310: Solvent and developer |
| M5000 | Positive Displacement | Photoresist |
New Unit Sales and Repair
KJT Japan provides new unit sales and repair services for IDI-CYBOR chemical dispense pumps and dispense units. Availability is confirmed individually according to the model, specification and equipment condition.
Features & Specifications
Primary chemicals, viscosity range, dispense volume, number of outputs and controller configuration vary by model.
| Feature | M610/M650 | M450/M550 | M7000 Series | M300/M310 | M5000 |
|---|---|---|---|---|---|
| Primary chemicals | High-viscosity photoresist Polyimides |
M450: Photoresist M550: SOG, FOX, SILK, DE |
Photoresist | M300: Photoresist M310: Solvent, developer |
Photoresist |
| Viscosity range | 300–30,000 cps | 0–300 cps | 0–3,000 cp Depending on configuration |
0–300 cps | 0–3,000 cps |
| Maximum dispense volume | 20 ml / 45 ml | 75 ml | Not stated in the supplied material | M300: 425 ml M310: 850 ml |
16 ml |
| Number of outputs | 1 | 1 | 1 | Up to 3 | 1 |
| Onboard source switching | No | No | Not stated | Yes | No |
| Internal reservoir | No | Yes | Not stated | Yes | No |
| Controller | Onboard controller PC connection required |
Onboard controller PC connection required |
Not stated | External controller required Up to 4 pumps |
External controller required |
| Drive gas | N/A | M450: Nitrogen M550: Helium/Argon |
Not stated | Nitrogen | N/A |
| Standard line size Official notation |
3/8, 1/2 | 1/8, 3/16, 1/4, 4 mm, 6 mm | Not stated | 1/4 input/output | 1/4, 3/8 |
* The listed M7000 Series information is based on the supplied TID Pump Line Card. Please contact KJT Japan regarding detailed specifications and new unit availability.
Applications & Models
M610/M650 | High Viscosity Dispense Unit
Designed for high-viscosity photoresist and polyimide applications. The viscosity range is 300–30,000 cps with one output.
M450/M550 | Pressure on Demand Dispense Unit
The M450 is primarily used for photoresist. The M550 is primarily used for SOG, FOX, SILK and DE. The viscosity range is 0–300 cps with one output.
M7000 Series | Positive Displacement Dispense Unit
A positive displacement dispense unit for photoresist applications. The supplied material lists a viscosity range of 0–3,000 cp depending on configuration, with one variable-rate output.
M300/M310 | Pressure on Demand Dispense Unit
The M300 is primarily used for photoresist, while the M310 is primarily used for solvent and developer. Both models cover a viscosity range of 0–300 cps and provide onboard source switching with up to three outputs.
M5000 | Positive Displacement Dispense Unit
A positive displacement dispense unit for photoresist applications. The viscosity range is 0–3,000 cps, the maximum dispense volume is 16 ml, and the unit provides one output.
New Unit Sales & Repair
KJT Japan provides new unit sales and repair services for IDI-CYBOR chemical dispense pumps and dispense units. Availability is confirmed according to the model, equipment configuration, chemical application and reported condition.
01 | New Unit Sales
Please provide the chemical type, viscosity, required dispense volume, number of outputs, controller configuration and equipment connection requirements. KJT Japan will confirm the applicable model, specifications and availability.
02 | Repair Service
Repair inquiries are accepted for the M610/M650, M450/M550, M7000 Series, M300/M310 and M5000. Repair feasibility is confirmed after reviewing the model, serial number, reported failure and current unit condition.
Information Required for Inquiry
• Manufacturer and model
• Serial number
• Chemical in use
• Failure symptoms
• Equipment and nameplate photographs
• New unit purchase or repair requirement
* New unit availability and repair feasibility vary depending on the model, specification, product condition and parts availability. Images are for reference only. Please contact KJT Japan for details.
