Compatible with TEL TRACK MARK & ACT Series
Hot Plate Series
KJT provides Hot Plate solutions compatible with the TEL TRACK MARK and ACT series. These Hot Plates are designed for use in semiconductor photolithography Coater / Developer systems and can support maintenance, replacement and equipment life-extension requirements.
In addition to supplying KJT-developed new Hot Plates, we also provide repair, refurbishment and technical support services for existing Hot Plates, helping customers maintain stable operation of legacy semiconductor manufacturing equipment.
Main Applications
The Hot Plate is an important temperature-control module used in TEL Clean Track Coater / Developer systems. KJT supports various Hot Plate and Plate Unit configurations according to the equipment model and application requirements.
Main Compatible Series
・TEL TRACK MARK 7
・TEL TRACK MARK 8
・TEL ACT 8
・TEL ACT 12
・PHP Unit
・Plate Unit
KJT Support
・New Hot Plate supply
・Existing Hot Plate repair
・Refurbishment service
・Technical support
・Long-term supply and equipment life-extension support
* Actual compatibility and specifications may vary depending on the equipment version, Hot Plate type, unit configuration and operating conditions. Please contact KJT for details.
TEL TRACK MARK & ACT Compatible Hot Plate Features
KJT Hot Plate solutions are designed to support TEL TRACK MARK and ACT series equipment, with emphasis on temperature control, temperature uniformity, product reliability, maintenance support and long-term availability.
01 | Compatible with TEL MARK & ACT Series
Supports a variety of Hot Plate applications for TEL TRACK MARK 7 / 8 and ACT 8 / 12 systems. Compatibility can be evaluated according to the equipment model and Plate configuration.
02 | High-Precision Temperature Control
Designed with emphasis on accurate temperature control to support stable heating conditions required in semiconductor photolithography processes.
03 | Excellent Temperature Uniformity
Good temperature uniformity across the Hot Plate surface helps maintain a stable process heating environment.
04 | KJT In-House Development
KJT develops its own Hot Plate solutions with a focus on quality, reliability and long-term operation of semiconductor manufacturing equipment.
05 | Repair & Refurbishment
In addition to new product supply, KJT provides repair and refurbishment services for existing Hot Plates, helping extend the usable life of equipment and components.
06 | Long-Term Supply Support
KJT supports long-term operation of legacy TEL TRACK MARK / ACT equipment through new product supply, repair, refurbishment and technical support.
KJT Hot Plate Key Advantages
・TEL TRACK MARK / ACT compatibility
・High-precision temperature control
・Excellent temperature uniformity
・KJT in-house development
・New Hot Plate supply
・Repair and refurbishment support
・Technical support and long-term supply
TEL TRACK MARK & ACT Compatible Models
KJT Hot Plate solutions support a wide range of TEL TRACK MARK and ACT series equipment. The following models and units represent major supported configurations and actual product examples.
Main Compatible Models
| Series | Compatible Models / Units |
|---|---|
| MARK Series | MARK 7 / 8 DHP / MARK 7 / 8 ADH / MARK 7 / 8 CPL (SMC TYPE) |
| ACT Series | ACT 8 / 12 HHP / ACT 8 / 12 LHP / ACT 12 CPL / ACT 12 HCH |
| Other Units | PHP Unit / Plate Unit |
MARK Series
MARK 7 / MARK 8 DHP
MARK 7 / MARK 8 ADH
MARK 7 / MARK 8 CPL (SMC TYPE)
ACT Series
ACT 8 / ACT 12 HHP
ACT 8 / ACT 12 LHP
ACT 12 CPL
ACT 12 HCH
PHP Unit
Plate Unit
Other Models
For TEL TRACK MARK and ACT models not listed above, KJT can evaluate compatibility based on the equipment model, Hot Plate type and unit configuration. Please provide the relevant equipment information for evaluation.
* The images shown are examples of compatible models and units. Actual specifications may vary depending on the equipment model, equipment version, Hot Plate specification, unit configuration and operating conditions.
TEL TRACK MARK & ACT Hot Plate Support Services
KJT provides comprehensive support for Hot Plates used in TEL TRACK MARK and ACT series equipment, including new product supply, repair, refurbishment, technical support and long-term availability.
01 | New Hot Plate Supply
KJT supplies new Hot Plates compatible with TEL TRACK MARK and ACT series equipment. Compatibility is evaluated based on the equipment model, Hot Plate type and unit configuration.
02 | Hot Plate Repair
For existing Hot Plates with operational issues or performance deterioration, KJT can evaluate the product condition and determine repair feasibility.
03 | Refurbishment
Existing Hot Plates and related units may be evaluated for refurbishment, helping extend the service life of equipment and components.
04 | Technical Support
KJT can assist with compatibility and replacement evaluation based on the equipment model, Hot Plate type, unit configuration and operating conditions.
05 | Long-Term Supply & Equipment Life Extension
KJT supports the long-term operation of legacy TEL TRACK MARK and ACT equipment through new product supply, repair, refurbishment and technical support.
Recommended Information for Inquiry
・Equipment series and model (MARK 7 / MARK 8 / ACT 8 / ACT 12, etc.)
・Hot Plate / Unit type (DHP / ADH / CPL / HHP / LHP / HCH / PHP Unit / Plate Unit, etc.)
・Product photos
・Part Number / Model Number
・Current failure or abnormal condition
・Required service: new replacement, repair or refurbishment
Need a Replacement or Repair Solution for a TEL TRACK MARK / ACT Hot Plate?
Please provide the equipment model, Hot Plate type and product photos.
KJT will evaluate the availability of a new replacement, repair or refurbishment solution.
* Actual service availability and repair feasibility depend on the equipment model, Hot Plate specification, unit configuration, product condition and operating environment.
